Cart (Loading....) | Create Account
Close category search window

Magnetic nanostructure fabrication by focused ion beam milling

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Allwood, D.A. ; Dept. of Phys., Durham Univ., UK ; Gang Xiong ; Cooke, M.D. ; Atkinson, D.
more authors

Summary form only given. Magnetic nanostructures with sub-100 nm features are usually fabricated by e-beam lithography but the process involves several steps and can be time inefficient in the production of small numbers of development samples. We report here the use of focused ion beam (FIB) milling to directly pattern ferromagnetic thin films as a rapid method of fabricating nanostructures. 5 nm thick, thermally evaporated Permalloy (Ni/sub 80/Fe/sub 20/) films were patterned with 30 keV Ga/sup +/ ions. The FIB spot diameter was 10 nm and, after milling depth calibration, an ion dose density of 11 cm/sup -2/ was used to ensure the complete removal of Permalloy at milling sites.

Published in:

Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International

Date of Conference:

April 28 2002-May 2 2002

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.