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Stress control and slider curvature adjust

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4 Author(s)
Mingsheng Zhang ; Data Storage Institute ; Yuet Sim Hor ; Guchang Han ; Bo Liu

Summary form only given. With the increasing data storage density in hard disk drives, the slider flying height keeps reducing and it is believed that a flying height of 5-7nm will be needed for an area density around 200GB/in2. The curvature control of the slider with ABS pattems is one of the key factors for flying height control during slider manufacturing process. Grinding, diamond-tip scribing and laser technologies have been used for the curvature adjustment. In this paper, stress-reducing technologies over the slider backside are studied for curvature adjustment. These technologies include lapping on a copper table with different size diamond, lapping on a tin table charged with diamond, and etching using inductive coupling plasma (ICP)system, which only use lapping or dry etching equipment, no specialized equipment are needed.

Published in:

Magnetics Conference, 2002. INTERMAG Europe 2002. Digest of Technical Papers. 2002 IEEE International

Date of Conference:

April 28 2002-May 2 2002