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A high performance, variable capacitance accelerometer

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1 Author(s)
Wilner, L.B. ; Allied Signal Aerosp. Co., San Juan Capistrano, CA, USA

A variable capacitance acceleration sensor is described. Manufactured using silicon microfabrication techniques, the sensor uses a midplane, flat plate suspension, gas damping, and overrange stops. The sensor is assembled from three silicon wafers, using anodic bonds to inlays of borosilicate glass. Typical sensor properties are 7-pF active capacitance, 3-pF tare capacitance, a response of 0.05 pF/G, a resonance frequency of 3.4 kHz, and damping 0.7 critical. It is concluded that this sensor, with appropriate electronics, forms an accelerometer with an order-of-magnitude greater sensitivity-bandwidth product than a comparable piezoresistive accelerometer, and with extraordinary shock resistance

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:37 ,  Issue: 4 )