The paper discusses efficient electrostatic field solutions techniques to simulate micro electro mechanical systems (MEMS): adaptive p-elements to remove the burden of manual mesh refinement; hybrid finite elements-Trefftz formulation to treat open boundary problems; energy based capacitance matrix and lumped capacitance value extraction
Published in:
Magnetics, IEEE Transactions on
(Volume:37
,
Issue:
5
)
Date of Publication: Sep 2001