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Analysis of the dynamics in microactuators using high-speed cine photomicrography

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3 Author(s)
Rembe, C. ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Tibken, B. ; Hofer, E.P.

This paper discusses the visualization of microdevice dynamics using high-speed cine photomicrograph. The visualization results in image sequences, which contain the kinematic position data of the moving parts in a microsystem. Utilizing a mathematical model, it is shown in this paper how to extract information about the forces and torques acting on the microdevice. Furthermore, the values of system parameters can be calculated if a dynamic model of the process is available and the identification of the parameters is unambiguous. In this paper, the model-based evaluation of high-speed-cinematographic image sequences is demonstrated for a microturbine and a microrelay. The measurements on the microturbine have been performed with a setup, which allows an image frequency up to 100 million frames per second for nonreproducible processes. The measurements of the microrelay have been taken with a second experimental setup using the stroboscopic principle. In the case of the microrelay, the complete identification of the dynamic model used by us is carried out. A first application of our identified model is the design of an optimal current pulse for the microrelay to damp oscillations

Published in:

Microelectromechanical Systems, Journal of  (Volume:10 ,  Issue: 1 )