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Magnetron sputtering of CoCr/Cr and CoCrTa/Cr on flexible substrates

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3 Author(s)
J. Veldeman ; Ghent Univ., Belgium ; H. Jia ; M. Burgelman

In this paper a new method is developed to deposit magnetic films on flexible substrates. The magnetron sputter process commonly used in hard disk technology is adapted to the specific needs of flexible substrates. By using a higher sputter pressure and no substrate heating the problem of substrate stress or deformation is solved. The influence of all major sputter parameters is discussed in this article. All samples mere characterized by magnetic measurements [hysteresis curve (H c, Mr, Ms), remanence and δM measurements], and by XRD and AFM

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IEEE Transactions on Magnetics  (Volume:36 ,  Issue: 5 )