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The 100% yield explanation approach in Lucent Technologies Madrid

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18 Author(s)
Recio, M. ; Lucent Technol. Microelectron., Madrid, Spain ; Merino, M.A. ; Martin, V. ; Ayucar, J.A.
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A wealth of advantages arise from breaking down the overall yield into yield components that are easier to work and closer to the manufacturing line environment. We present in this paper our strategy to attempt the 100% yield explanation on our fab and the process of building a pareto that quantifies the impact of each yield component (defects, probe, nothing found, etc...). The most critical one, the defect related, is accounted by a set of knowledge-based automatic software tools that operate in our fab. They quantify it and break it down into the by layer, by defect size and type (ADC) contributions. The step forward of communication and deployment of this yield strategy is a key topic also discussed in the paper. On our way towards the 100% understanding of yield we have learned how to better manage it and taken advantage of many more opportunities to improve it. The strategy has shown to work both for new and mature technologies in our manufacturing line in Lucent Technologies Madrid

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Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI

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