This article is devoted to investigation of multilayer diffraction grating using spectroscopic ellipsometry. The present study demonstrates the capability of techniques used as a tool to obtain information about the possibilities to control of photon-surface plasmon coupling at a multilayer diffraction gratings and usefulness especially for optochemical sensors and photodetectors application
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Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Date of Conference: 2000