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Vertical silicon MOSFETs based on selective epitaxial growth

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9 Author(s)
Moers, J. ; Institut fur Schicht- und lonentechnik ; Tonnesmann, A. ; Klaes, D. ; Vescan, L.
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First Page of the Article

Published in:

Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on

Date of Conference:

2000