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Non-conventional technologies for micro-optical components: a survey

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1 Author(s)
Dumbravescu, N. ; Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania

Although “traditional” silicon planar technology has generated the field of microoptics, it is able to produce only a few shapes. To avoid that, many “non-conventional” alternative technologies, based especially on different polymeric materials, are presently investigated. This paper reports on the experimental study of three such technologies; LiGA based techniques, gray-tone lithography and embossing alternatives in polymers

Published in:

Semiconductor Conference, 2000. CAS 2000 Proceedings. International  (Volume:2 )

Date of Conference:

2000