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Nickel doped PZT type ceramics for displacement microsystems

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4 Author(s)
Miclea, C. ; Hyperion Univ., Bucharest, Romania ; Tanasoiu, C. ; Spanulescu, S. ; Miclea, C.F.

A soft PZT type material was prepared by the usual ceramic technique and was doped with Ni. Doping levels of about 20 at.% provided piezoelectric materials with improved characteristics. Thus the electromechanical planar coupling coefficient increased to 0.64, the relative dielectric constant to nearly 5500 and the piezoelectric charge constant d33 to over 800·10-12 m/N. Such materials are extremely suitable for actuators and micromotors applications

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Semiconductor Conference, 2000. CAS 2000 Proceedings. International  (Volume:2 )

Date of Conference: