Low-power micromachined microsystems

Micromachined microsystems and micro electromechanical systems (MEMS) have made possible the development of highly accurate and portable sensors and instruments for a variety of applications in health care, industrial, consumer products, avionics, and defense. Design of low-power circuits for these applications, and use of micromachined sensors and actuators in combination with integrated circuits to implement even lower power microinstruments has now become possible and the focus of attention. This paper reviews the state of the art in the development of micromachined microsystems and MEMS, discusses low-power design approaches for microsystems, and reviews some recent development in power generation and energy harvesting from the environment.