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Application of a resource planning system for a VLSI assembly facility

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4 Author(s)
K. Saito ; Univ. of Aizu, Fukushima, Japan ; S. Arima ; T. Yokoyama ; H. Yamanaka

This paper concerns a resource planning system for a VLSI assembly facility. The algorithm used for planning is based on the M/M/m queueing model with an incoming buffer and two kinds of resources (the number of machines and the number of operators) are considered simultaneously. This planning system has been examined in an actual facility for 5 months and was evaluated to have enough accuracy and a very short calculation time for a real application in planning machinery resources and turnaround times

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Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Date of Conference: