A prime factor of the production loss is a plan, and non-plan stop of equipment. However, if the equipment obstruction degree can be calculated, and the thing to restore large equipment of the obstruction degree prior be done, the obstruction degree can be made the most small. We developed a system that determines the recovery priority to improve production efficiency. The system obtains the instantaneous loss from changing work-in-process, calculates the optimum recovery priority in a short period based on the obtained value, and gives resource entry instructions to appropriate places
Published in:
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Date of Conference: 1999