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Design, tolerance analysis, and fabrication of silicon oxynitride based planar optical waveguides for communication devices

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3 Author(s)
Worhoff, K. ; MESA Res. Inst., Twente Univ., Enschede, Netherlands ; Lambeck, P.V. ; Driessen, A.

Planar optical waveguiding structures for application in communication networks are highly demanding with respect to low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, high integration density, reliable fabrication, and last but not least cost efficiency. When applying silicon oxynitride, which is a very versatile material, planar waveguiding structures can be designed having the potential of meeting all those requirements. In this paper, we will describe the design of such a waveguiding structure, demonstrate the practical feasibility of realizing this structure and discuss the preliminary measurement results

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Lightwave Technology, Journal of  (Volume:17 ,  Issue: 8 )