By Topic

Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies [for microrobotics application]

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
W. L. Jin ; California Univ., Berkeley, CA, USA ; C. D. Mote

A six-component miniature force sensor (5×5×5 mm3 ) is developed using microfabrication and conventional precision machining technologies. High sensitivity and high stiffness are obtained simultaneously with a novel silicon sensing element design. Fair agreement between predicted and measured sensitivities is obtained

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:47 ,  Issue: 3 )