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On the use of the matrix pencil method for deep level transient spectroscopy: MP-DLTS

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4 Author(s)
F. Boussaid ; Lab. d'Anal. et d'Archit. des Syst., CNRS, Toulouse, France ; F. Olivie ; M. Benzohra ; A. Martinez

A new approach to capacitance transient analysis, based on the matrix pencil (MP) method, is proposed for deep level transient spectroscopy (DLTS) (MP-DLTS). The MP method offers the least statistical variance of the estimates in the presence of noise. Simulation tests have shown this method to lead to a significant improvement in DLTS resolution even for low trap concentrations. Its noise sensitivity and resolution are quantified and compared with five different DLTS analysis techniques. The MP-DLTS method is found to outperform both DLTS spectrum and direct transient analysis techniques. An experimental investigation of the electrically active defects induced by a germanium preamorphization step prior to dopant implantation was undertaken using the MP-DLTS method. Two electron traps were detected in all samples and characterized

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:47 ,  Issue: 3 )