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Correlation of digital image metrics to production ADC matching performance

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4 Author(s)
Blais, J. ; Microelectron. Div., IBM Corp., Essex Junction, VT, USA ; Fischer, V. ; Moalem, Y. ; Saunders, M.

Automatic defect classification tool matching requires that consistent quality images are captured on all tools. Image metrics have been developed and the variance of these metrics have been correlated to classifier matching. It is shown that in order to maintain tool matching, image color balance, focus, and shadowing must be monitored and maintained at acceptable values. Of these metrics, inappropriate color balance has the greatest effect on matching

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Date of Conference:

23-25 Sep 1998