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On the calibration of multicomponent microforce sensors

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2 Author(s)
Wenlin Jin ; Sch. of Mech. & Production Eng., Nanyang Technol. Univ., Singapore ; Mote, C.D.

A calibration method for multicomponent microforce sensors using Lorentz forces is proposed. The method permits generation of six force and moment components in three orthogonal directions on two-dimensional (2-D) structures that can be fabricated through existing silicon micromachining technology. Two multicomponent microforce sensor and calibration devices were developed and tested to verify the method

Published in:

Microelectromechanical Systems, Journal of  (Volume:7 ,  Issue: 2 )