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Ultrasonic linear motor for a high precision X-Y stage

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3 Author(s)
Mori, K. ; Hitachi Ltd., Ibaraki, Japan ; Kumagae, T. ; Hirai, H.

Experiments on a mechanical configuration and control system for an ultrasonic linear motor for a high precision X-Y stage were conducted, and a velocity up to 100 mm/s and a positioning resolution of 0.016 mu m were obtained. The motor consists of a piezoelectric drive element using multilayer piezoelectric ceramic actuators. To realize both long-distance drive and very precise positioning, the ultrasonic linear motor has a coarse mode and a fine mode. The coarse mode is a friction drive mechanism and the fine mode is a direct-drive mechanism. The control system selects each mode according to the difference between a present position and an objective position.<>

Published in:

Ultrasonics Symposium, 1989. Proceedings., IEEE 1989

Date of Conference:

3-6 Oct. 1989

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