Referenced Items are not available for this document.
A resonant vibration sensor realized using silicon micromachining for wear monitoring of rotating machinery is described. It comprises a mechanical resonator, piezoresistive bridge, and components for fiber-optical signal readout by an infrared light-emitting diode. The performance of the microsystem is demonstrated by its static and dynamical behavior. The results confirm that the described sensor has the potential for on-line vibration control of rotating machinery operated under the conditions of industrial production
Published in:
Microelectromechanical Systems, Journal of
(Volume:7
,
Issue:
1
)
Date of Publication: Mar 1998
- Page(s):
- 56 - 61
- ISSN :
- 1057-7157
- INSPEC Accession Number:
- 5861227
- Digital Object Identifier :
- 10.1109/84.661384
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Mar 1998
- Sponsored by :
- IEEE Electron Devices Society
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