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Micromachined widely tunable vertical cavity laser diodes

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3 Author(s)
F. Sugihwo ; Solid State Electron. Lab., Stanford Univ., CA, USA ; M. C. Larson ; J. S. Harris

Wavelength tunable vertical-cavity surface-emitting lasers (VCSELs) are potentially useful for future optical communications. Traditionally, the emission wavelength of a vertical cavity laser was tuned by modulating the active region temperature. However, thermal tuning is slow, and the realized tuning range is quite limited. Micromachined tunable VCSELs (Mi-T-VCSELs) combine the traditional vertical cavity laser structure with a monolithically micromachined deformable membrane, enabling continuous wavelength tuning without mode hopping. In addition to a large wavelength tuning range, this technique does not suffer from the shortcomings of the thermal tuning technique. This paper presents the background theory, processing sequence, and experimental results for Mi-T-VCSELs

Published in:

Journal of Microelectromechanical Systems  (Volume:7 ,  Issue: 1 )