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Dielectric function evolution as Bruggeman method solution

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4 Author(s)
Rotaru, C. ; Nat. Res. Dev. Inst. for Microtechnol., Bucharest, Romania ; Flueraru, C. ; Nastase, S. ; Rotaru, I.

The ellipsometry is a proper technique for analyzing dielectric response of thin solid films, particularly for polycrystalline silicon. The behavior of dielectric function is usually analyzed by the Effective Medium Approximation (Bruggeman model), which gives three solution. The physical problem has only one solution. In this paper are discussed from a physical point of view the solutions of dielectric function

Published in:

Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International  (Volume:2 )

Date of Conference:

7-11 Oct 1997