By Topic

A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Venkatesh, S. ; Dept. of Appl. Mater., Metal Deposition Products Group, Santa Clara, CA, USA ; Davenport, R. ; Foxhoven, P. ; Nulman, J.

An analysis of throughput in a cluster tool with a dual-blade robot operating in steady-state mode is presented. The analysis is based on a single-wafer serial processing cluster tool. Two types of schedules are distinguished, called transport-bound schedules and process-bound schedules. In a transport-bound schedule changes in process times do not affect the throughput of the cluster tool, and denotes the maximum throughput achievable in the cluster tool. In a process-bound schedule, the process time predominates the effect on the throughput. The analysis indicates that a dual-blade robot improves the throughput of the cluster tool over a single-blade robot under process-bound conditions. Under process-bound conditions, a cluster tool with a single-blade robot would need to double the speed of the robot, compared with a dual-blade robot of equivalent speed, to achieve similar throughput. Under transport-bound conditions, the throughput of the cluster tool is the same for both dual-blade and single-blade cluster tools

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:10 ,  Issue: 4 )