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Analysis of electrical test data using a neural network approach

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7 Author(s)
Koppenhoefer, B. ; Inst. fur Organische Chem., Tubingen, Germany ; Wuerthner, S. ; Ludwig, L. ; Rosenstiel, W.
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This project aims at the development of new and fast tools helping to interpret the results of electrical measurements of chips (functional data) and of test structures between the chips, the so called process control monitors (PCM). The goal is to recognize and classify deviations in these results as soon as they become available so that process corrections can be implemented more quickly

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Date of Conference:

10-12 Sep 1997