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In this paper, the wavelength interrogation of optical sensors by novel thermo-optic tunable filters with multiple partially reflected slanted mirrors in silicon-on-insulator (SOI) technology is presented. The tunable filter is used both for tunable band selection of broadband light source interrogating the optical sensors, as well as for precise detection of interrogation optical wavelength. New interrogator design is numerically studied by 2-D finite-difference time-domain and finite-element method for a compact structure. The investigation demonstrates the performance of an interrogator on SOI, 1 cm long, having about 1 pm wavelength resolution and 1 ms scanning over 40 nm range at 1550 nm, with an operation power of about 16 mW.