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Silicon nanofabrication technologies for compact integrated receivers working at THz frequencies

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8 Author(s)
Jung, C. ; Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA ; Lee, C. ; Chattopadhyay, G. ; Siles, J.
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Silicon nanofabrication technologies provide precise dimensional control and batch processing capability. These features have been exploited to enable novel active and passive components in the submillimeter-wave region. We report on silicon micromachined methodologies that will enable large format submillimeter-wave heterodyne arrays and 3-D integration of the whole receiver front-end.

Published in:

Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on

Date of Conference:

2-7 Oct. 2011