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Development of low-cost poly(vinyldifluoride) sensor for low-pressure application

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3 Author(s)
Mahale, B.P. ; Dept. of Electron. Sci., Univ. of Pune, Pune, India ; Bodas, D. ; Gangal, S.A.

The development of a poly(vinyldifluoride) (PVdF)-based dynamic pressure sensor for low-pressure application is reported. β-phase PVdF film of thickness 10 m is fabricated using the spin coating method with thermally evaporated Al electrodes (200 nm) on both sides of the film. The film is polled and packaged in a poly(dimethyl siloxane) block. The exposed area of the pressure sensor is 500 m in diameter. A signal conditioning circuit is designed to amplify the signal and a NI DAQ card with LabVIEW software is used to acquire the signal on a PC. The dynamic pressure response of the sensor is recorded which shows linearity in detection. Pressure measured by the sensor is in the range of 10-150 kPa.

Published in:

Micro & Nano Letters, IET  (Volume:6 ,  Issue: 7 )