Pyroelectric properties of PZT(90/10) thin films on Pt/Si substrates

The pyroelectric properties of PZT (90/10) thin films were investigated. The films were prepared by metallo-organic spin deposition (MOD) technique on Pt(111)/Si substrates. Dense, (111)-oriented films, /spl sim/1.0 /spl mu/m thick, had a remnant polarization of 13-20 /spl mu/C/cm/sup 2/ and a coercive field of 10/spl sim/30 kV/cm. By using static measurement, a pyroelectric coefficient of the order of 10/sup -8/ C/cm/sup 2/ K was determined in the temperature range of 25/spl sim/140/spl deg/C, comparable to bulk PZT (90/10) ceramics. Under dynamic pyroelectric measurement conditions, using chopped laser radiation, current and voltage response was detected. Thermal-electric conversion studies indicated significant potential for infrared imaging and energy conversion applications for these PZT films.