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MEMS technology development and manufacturing in a CMOS foundry

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13 Author(s)
Liu, C.M. ; Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan ; Chou, B.C.S. ; Tsai, R.C.-F. ; Shen, N.Y.M.
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MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process “phase-in” and internally developed “platform” are discussed. The latter is a TSMC-MEMS platform for motion sensors and other devices.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011