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An Ultra-Low-Power readout architecture for capacitive MEMS-based accelerometers and strain sensors is presented. The system can read both accelerometers and strain sensors in a half-bridge configuration. The gain is controlled by integrating pulses from the excitation voltage allowing accurate control of the Signal-to-Noise ratio. A Figure-of-Merit of 4.41×10-20 F√(W/Hz) was achieved for a sensor range of ±2.0g and ±20,000με over a 100Hz bandwidth. Residual motion artifacts are also cancelled by the system.
Date of Conference: 5-9 June 2011