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An Ultra-Low-Power readout architecture for capacitive MEMS-based accelerometers and strain sensors is presented. The system can read both accelerometers and strain sensors in a half-bridge configuration. The gain is controlled by integrating pulses from the excitation voltage allowing accurate control of the Signal-to-Noise ratio. A Figure-of-Merit of 4.41×10-20 F√(W/Hz) was achieved for a sensor range of ±2.0g and ±20,000με over a 100Hz bandwidth. Residual motion artifacts are also cancelled by the system.
Published in:
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Date of Conference: 5-9 June 2011
- Page(s):
- 36 - 39
- ISSN :
- Pending
- Print ISBN:
- 978-1-4577-0157-3
- INSPEC Accession Number:
- 12169251
- Conference Location :
- Beijing
- Digital Object Identifier :
- 10.1109/TRANSDUCERS.2011.5969127
- Product Type:
- Conference Publications
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