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Fabrication and Integration of Micromachined Submillimeter-Wave Circuits

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2 Author(s)
James R. Stanec ; Northrup Grumman Corporation, Colorado Springs ; N. Scott Barker

Micromachining techniques have been shown to have the necessary precision to fabricate accurate submillimeter-wave circuits and structures; however, few submillimeter-wave circuits created by these techniques have been integrated into existing systems. This article builds on previous lithographic micromachining techniques to fabricate and integrate geometrically complex submillimeter-wave waveguide circuits that cannot be fabricated by conventional machining, specifically a lowpass filter.

Published in:

IEEE Microwave and Wireless Components Letters  (Volume:21 ,  Issue: 8 )