Referenced Items are not available for this document.
Micromachining techniques have been shown to have the necessary precision to fabricate accurate submillimeter-wave circuits and structures; however, few submillimeter-wave circuits created by these techniques have been integrated into existing systems. This article builds on previous lithographic micromachining techniques to fabricate and integrate geometrically complex submillimeter-wave waveguide circuits that cannot be fabricated by conventional machining, specifically a lowpass filter.
Published in:
Microwave and Wireless Components Letters, IEEE
(Volume:21
,
Issue:
8
)
Date of Publication: Aug. 2011
- Page(s):
- 409 - 411
- ISSN :
- 1531-1309
- INSPEC Accession Number:
- 12205517
- Digital Object Identifier :
- 10.1109/LMWC.2011.2158411
- Product Type:
- Journals & Magazines
- Date of Publication :
- 11 July 2011
- Date of Current Version :
- 08 August 2011
- Issue Date :
- Aug. 2011
- Sponsored by :
- IEEE Microwave Theory and Techniques Society
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