Cart (Loading....) | Create Account
Close category search window
 

Integration of automated defect classification into integrated circuit manufacturing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Breaux, L. ; Motorola Inc., Austin, TX, USA ; Kawski, J. ; Singh, B.

Automated defect classification (ADC) has been identified by SEMATECH and its member companies as one of the important enabling technologies required for the next generation advanced wafer fabs. ADC can provide significant improvements in resource allocation and yield enhancement. In the evaluation of a new tool for ADC, several important aspects regarding integration of this technology into manufacturing were investigated. In that this tool represents technology that will, in effect, make decisions regarding defectivity, the use of fuzzy logic was required. Through fuzzy logic, a supervised self-learning approach was implemented to train the ADC tool. Additionally, defect images were “quantified” in terms of fuzzy truth values to facilitate process analysis and new defect introduction into the process. This paper will discuss the increased need for ADC based upon the current defect reduction schemes that are strongly desired for improved company/product competitiveness. This paper also seeks to address some of the challenges in implementing ADC in the wafer production fab

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI

Date of Conference:

14-16 Nov 1994

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.