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Enhancing the Linear Range of MEMS Resonators for Sensing Applications

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5 Author(s)
Tocchio, A. ; Dept. of Electron. & Inf. Technol., Politec. di Milano, Milan, Italy ; Comi, C. ; Langfelder, G. ; Corigliano, A.
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In this paper, mechanical and electrical nonlinearities of MEMS resonators are discussed and their influence on the resonant sensing performance is analyzed. An “L-shaped” resonator is proposed in order to reduce the influence of the nonlinear mechanical term on the global response with respect to the more standard clamped-clamped (“I-shaped”) resonator. An extended linear behavior of the “L-shaped” resonator is analytically demonstrated and validated through experimental results. As a consequence, the proposed resonator can be driven to larger vibration amplitudes through higher actuation voltages, allowing better signal-to-noise ratio (SNR).

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 12 )