By Topic

A 2.2 mA 4.3 mm ^{2} ASIC for a 1000 ^{\circ} /s 2-Axis Capacitive Micro-Gyroscope

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Aaltonen, L. ; Dept. of Micro & Nanosci., Aalto Univ., Espoo, Finland ; Kalanti, A. ; Pulkkinen, M. ; Paavola, M.
more authors

The interface for a capacitive 2-axis micro-gyroscope is implemented in a 0.35-μm HVCMOS technology with a total area of 4.3 mm2. The ASIC comprises the complete analog interface electronics for the gyroscope, while the focus of the design is in maintaining low supply current and in reducing the chip area. The paper reports the design of reference circuits, high-voltage generation, drive-loop and the capacitive open-loop readout circuits. The prototype sensor that is measured is assembled by directly wire-bonding the stacked dies comprising the interface electronics and the sensor element. The noise floors of the two sensors are 0.028°/s/√{Hz} for z-axis and 0.032°/s/√{Hz} for y-axis. The supply current of the chip is 2.2 mA from a 3 V-supply.

Published in:

Solid-State Circuits, IEEE Journal of  (Volume:46 ,  Issue: 7 )