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Selective self-assembly of nanoparticles on trench sidewalls and its relationship with scallop nanostructure

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5 Author(s)
M. Abasaki ; 3D BEANS Center, BEANS Project, JAPAN ; S. Souma ; M. Takeda ; N. Moronuki
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Self-assembly of colloidal particles has an advantage of low cost, high productivity and applicability to various devices. The capability of assembling nano-scale particles on three dimensional structures can extend the fields of application, such as high-sensitivity gas sensors and bioassay devices with surface-functionalized particles. We demonstrate such assembly where monolayer polystyrene particles were assembled only on the sidewall of trenches etched on a silicon wafer. Moreover, it was found that the assembly structure can be controlled by the scallops when its periodicity is nearly the same as the particle diameter.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011