Referenced Items are not available for this document.
A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.
Published in:
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Date of Conference: 23-27 Jan. 2011
- Page(s):
- 9 - 12
- ISSN :
- 1084-6999
- Print ISBN:
- 978-1-4244-9632-7
- INSPEC Accession Number:
- 11928216
- Conference Location :
- Cancun
- Digital Object Identifier :
- 10.1109/MEMSYS.2011.5734349
- Product Type:
- Conference Publications
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