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A translatory MOEMS actuator with extraordinary large stroke-especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers-is presented for the first time. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm2 aperture using four pantographs. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 500 Hz amplitude has been measured in vacuum of 50 Pa and 90 V driving voltage.
Date of Conference: 9-12 Aug. 2010