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3D integration development has to be driven by industrial demand and applications. To get interested in those technological developments, industrials shall be convinced by benefits of Through Silicon Vias (TSV) integration versus traditional assembly approach. This will demonstrate that this approach is worth being more developed and implemented. In this study, we demonstrated that we are able to achieve similar performance for a given product using a standard wire bonding packaging and an integration with TSV. Both electrical measurements on test structures and characterization on product are compared.
Date of Conference: 13-16 Sept. 2010