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Guest Editorial Equipment and Operations Automation in the Semiconductor Industry

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7 Author(s)
James R. Morrison ; Korea Advanced Institute of Science and Technology (KAIST), Yuseong, Daejeon, Korea ; Chen-Fu Chien ; Stéphane Dauzère-Pérès ; Milind Dawande
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The nine The ten papers in this special issue focus on three areas: equipment automation, operations automation, and modeling.

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IEEE Transactions on Automation Science and Engineering  (Volume:8 ,  Issue: 1 )