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Guest Editorial Equipment and Operations Automation in the Semiconductor Industry

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7 Author(s)
Morrison, J. R. ; Korea Advanced Institute of Science and Technology (KAIST), Yuseong, Daejeon, Korea ; Chien, C.-F. ; Dauzere-Peres, S. ; Dawande, M.
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The nine The ten papers in this special issue focus on three areas: equipment automation, operations automation, and modeling.

Published in:

Automation Science and Engineering, IEEE Transactions on  (Volume:8 ,  Issue: 1 )

Date of Publication:

Jan. 2011

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