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Waferless pattern recognition recipe creation using StatTrax

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3 Author(s)
Ridens, M.G. ; Motorola Inc., Chandler, AZ, USA ; Wilson, E.R. ; Harris, T.A.

Motorola MOS-12 uses Tencor UV-1050 and FT-750 Film Thickness probes for on product measurements at many steps in the fabrication process. Master recipes are manually created for the first mask set of any new process flow. By utilizing a standard scribe grid structure, recipes for subsequent mask sets are created by copying the master recipes then making changes to the coordinates in the die map and pattern recognition sections of each recipe. The ability to create recipes this way reduces engineering time required for new product introduction and significantly reduces cycle time for lead lots. The method provides the best recipe integrity possible and allows the elimination of costly test wafers

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996

Date of Conference:

12-14 Nov 1996