By Topic

Electrostatic Torsional Micromirror With Enhanced Tilting Angle Using Active Control Methods

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Yuan Ma ; Dept. of Electr. & Comput. Eng., Dalhousie Univ., Halifax, NS, Canada ; Islam, S. ; Ya-Jun Pan

Electrostatic microelectromechanical systems (MEMS)-based torsional micromirrors are a fundamental building block for many optical network applications, such as optical wavelength-selective switches, configurable optical add-drop multiplexers and optical cross-connects. Although the device architecture, materials and fabrication processes determine the micromirrors' functioning space, one major technical challenge to achieving their full performance potentials is the controllability and stability of the tilting angle. In this paper, an electrostatic micromirror is designed and fabricated using a standard MEMS silicon-on-insulator (SOI) process. Active control approaches including gain scheduling and nonlinear proportional and derivative (PD) control are proposed. Both approaches can improve the performance of the mirror tilting and enhance the robustness of the structures to any stochastic perturbations. Furthermore, the nonlinear PD control can eliminate the micromirror “pull-in” phenomenon, hence significantly expanding the mirror tilt range, and as a result achieving enhanced device performance and functionality. The nonlinear PD control method is experimentally implemented and the results demonstrate the effectiveness of the approach.

Published in:

Mechatronics, IEEE/ASME Transactions on  (Volume:16 ,  Issue: 6 )