Referenced Items are not available for this document.
Driven by upcoming simulation and optimization applications with increasing complexity, the demand for more detailed equipment models is growing. The effort to create and to parameterize practicable equipment models by providing capacity limitations and predicting processing times increases as well. Automated modeling strategies based on MES data using data mining techniques increase the efficiency of today's modeling policies remarkably.
Published in:
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Date of Conference: 11-13 July 2010
- Page(s):
- 11 - 16
- ISSN :
- 1078-8743
- Print ISBN:
- 978-1-4244-6517-0
- INSPEC Accession Number:
- 11477940
- Conference Location :
- San Francisco, CA
- Digital Object Identifier :
- 10.1109/ASMC.2010.5551413
- Product Type:
- Conference Publications
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
