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Integrated cryogenic current comparator based on superconductor LSI technology

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11 Author(s)
Urano, C. ; Nat. Metrol. Inst. of Japan (NMIJ), Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan ; Maruyama, M. ; Oe, T. ; Maezawa, M.
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A new implementation of Sullivan-Dziuba type cryogenic current comparators (CCCs) is proposed. We designed an integrated CCC device consisting of a thin-film CCC, a pick-up coil and a SQUID sensor on a single chip. Prototype devices were fabricated by using a superconductor multilayer integrated circuit technology with chemical-mechanical polishing processes.

Published in:

Precision Electromagnetic Measurements (CPEM), 2010 Conference on

Date of Conference:

13-18 June 2010