By Topic

Characterization of porous silicon based optical sensor system for biosensor applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Kovacs, A. ; Inst. for Appl. Res., Hochschule Furtwangen Univ., Furtwangen, Germany ; Jonnalagadda, P. ; Meng, X.Y. ; Mescheder, U.

Porous silicon based multilayer structures for optical sensors have been simulated, fabricated and tested. The properties of optical sensors using porous silicon multilayer can be adjusted by appropriate substrate material, morphology, process parameters in the pore formation process and by surface treatment (thermal oxidation). Heavily and lightly doped p-doped substrates have been used to realize porous silicon layers with different morphology, porosity (30-80%), pore size (mesoporous range) and specific surface area (200-700 m2/cm3). Thermal oxidation stabilizes the surface and results in hydrophilic surfaces for effective adsorption of liquid analytes. Oxidation reduces the porosity and the pore size but improves the wetting behavior of liquid analytes in the porous volume. Different multilayer structures using native and oxidized porous silicon and corresponding concepts of optical sensor systems have been proved for aqueous and organic analytes. Sensors using small pore size (2-4 nm) and high porosity (70-80%) have been realized and characterized. A simple, low cost optical sensor system based on multilayer, a tunable light source and a detector has been realized.

Published in:

Sensors, 2009 IEEE

Date of Conference:

25-28 Oct. 2009