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Microcantilever Array Pressure Measurement System for Biomedical Instrumentation

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6 Author(s)
Wenchao Qu ; Dept. of Electr. Eng. & Comput. Sci., Univ. of Tennessee, Knoxville, TN, USA ; Islam, S.K. ; Mahfouz, M.R. ; Haider, M.R.
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An analog signal processing integrated circuit for microcantilever array has been designed for pressure measurement in biomedical applications. The chip consists of analog multiplexer, instrumentation amplifier, sample-and-hold circuit, on-chip voltage and current references, successive approximation register analog-to-digital converter (ADC) and digital control unit. Root sum square (RSS) error from the overall pressure measurement system including microcantilever array and the application specific integrated circuit (ASIC) is only ±1.79 KPa within the measurement range of 0-300 KPa. The 8-bit ADC attains 45.4 dB signal-to-noise-and-distortion ratio (SNDR) and 56.4 dB spurious-free dynamic range (SFDR), while operating at 772 KHz. The integrated circuit has been fabricated using 0.35-¿m 2-poly 4-metal CMOS process technology. The chip occupies an area of 1.54 mm2 and consumes 17.8 mW of power with a single 3.3 V supply.

Published in:

Sensors Journal, IEEE  (Volume:10 ,  Issue: 2 )