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Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop

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5 Author(s)
Salvia, J.C. ; Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA ; Melamud, R. ; Chandorkar, Saurabh A. ; Lord, S.F.
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We present a new temperature compensation system for microresonator-based frequency references. It consists of a phase-locked loop (PLL) whose inputs are derived from two microresonators with different temperature coefficients of frequency. The resonators are suspended within an encapsulated cavity and are heated to a constant temperature by the PLL controller, thereby achieving active temperature compensation. We show repeated real-time measurements of three 1.2-MHz prototypes that achieve a frequency stability of ?? 1 ppm from -20??C to +80??C, as well as a technique to reduce steady-state frequency errors to ??0.05 ppm using multipoint calibration.

Published in:

Microelectromechanical Systems, Journal of  (Volume:19 ,  Issue: 1 )

Date of Publication:

Feb. 2010

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