By Topic

Reducing Cross-Coupling in a Compliant XY Nanopositioner for Fast and Accurate Raster Scanning

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Yong, Y.K. ; Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Newcastle, NSW, Australia ; Kexiu Liu ; Moheimani, S.O.R.

A compliant XY nanopositioner is presented in this brief. The device is designed to have a very low cross-coupling between the X- and Y-axis. Despite this, during high-speed raster scans, the cross-coupling effect can not be ignored. In this brief, a H controller is designed and implemented to minimize the X-to- <;i>Y<;/i> cross-coupling of the nanoscale positioning stage, particularly at its mechanical resonance frequencies. The controller is augmented with integral action to achieve accurate tracking, as well as sufficient damping. Raster scan results over an area of 10 μm × 10 μm with small positioning errors are demonstrated. High-speed accurate raster scans of up to 100 Hz, with nanoscale resolution are also illustrated.

Published in:

Control Systems Technology, IEEE Transactions on  (Volume:18 ,  Issue: 5 )