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The fabrication of a membrane supported long-range surface plasmon polariton waveguide for use as a biosensor is described. This type of device can be completely immersed in the sensing environments to create symmetrical waveguide surroundings. The membrane is created from the fluoropolymer CYTOP which has strong physical properties and a low index of refraction. The fabrication steps of this device are described along with examples of completed structures.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (Volume:27 , Issue: 4 )
Date of Publication: Jul 2009