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Silicon resonant microcantilevers for absolute pressure measurement

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12 Author(s)
Bianco, S. ; χ Lab, Materials and Microsystems Laboratory, Polytechnic of Turin, Lungo Piazza D’Armi 6, Chivasso, Turin 10034, Italy ; Cocuzza, M. ; Ferrero, S. ; Giuri, E.
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This work is focused on the developing of silicon resonant microcantilevers for the measurement of the absolute pressure. The microcantilevers have been fabricated with a two-mask bulk micromachining process. The variation in resonance response of microcantilevers was investigated as a function of pressure (10-1–105 Pa), both in terms of resonance frequency and quality factor. A theoretical description of the resonating microstructure is given according to different molecular and viscous regimes. Also a brief discussion on the different quality factors contributions is presented. Theoretical and experimental data show a very satisfying agreement. The microstructure behavior demonstrates a certain sensitivity over a six decade range and the potential evolution of an absolute pressure sensor working in the same range.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 4 )

Date of Publication:

Jul 2006

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